Diameter: up to 150mm Length of ingot: up to 150 mm. Orientation: <100>, <111>, <100> +6° towards <111> Tolerance on wafers: ± 0.5 ° EPD value: from 500 to 5000/cm2. Dopant: p-type Gallium (Ga), n-type Antimony (Sb). Resistivity at 20 °C: from 0.002 to 45 Wcm. Radial dispersion of resistivity: from 1 to 10 % Axial dispersion of resistivity along ingot: from 10 to 30 %
